[1]Elliott M, May P, Petherbridge J, et al. Optical? emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas[J]. Diamond and Related Materials, 2000, 9(36): 311316.
[2]Torres J, Palomares J M, Sola A, et al. A Stark broadening method to determine simultaneously the electron temperature and density in highpressure microwave plasmas[J]. Journal of Physics D: Applied Physics, 2007, 40: 59295936.
[3]Roth J R. Industrial Plasma Engineering. London: Taylor & Francis Group, 2001.
[4]德列斯文C B.低温等离子体物理及技术[M]. 唐福林,陈元明,毛斌,译. 北京:科学出版社, 1980:83.
[5]郑培超,王鸿梅,李建权,等. 大气压直流微等离子体射流研究[J]. 光谱学与光谱分析, 2008, 28(10): 22242227.
[6]Sansonetti J E, Martin W C. Handbook of basic atomic spectroscopic data [J]. Journal of Physical and Chemical Reference Data, 2005, 34(5): 15592259.
[7]董丽芳,冉俊霞,尹增谦,等. 大气压氩气介质阻挡放电中的电子激发温度[J]. 光谱学与光谱分析, 2005, 25(8): 11841186.
[8]陈晓斌,蔡小舒,范学良,等. 原子发射双谱线法测火焰温度的实验研究[J]. 光谱学与光谱分析, 2009, 29(12): 31773180.
[9]吴利峰,马志斌,翁国峰,等. 高气压微波氢等离子体发射光谱诊断[J]. 强激光与粒子束, 2010, 22(9): 20272031.
[1]黄宏伟,张田田,丁康俊,等.MPCVD制备金刚石中的光谱分析[J].武汉工程大学学报,2017,39(01):39.[doi:10. 3969/j. issn. 1674?2869. 2017. 01. 007]
HUANG Hongwei,ZHANG Tiantian,DING Kangjun,et al.Optical Emission Spectroscopy Analysis of Diamond Deposited by MPCVD[J].Journal of Wuhan Institute of Technology,2017,39(07):39.[doi:10. 3969/j. issn. 1674?2869. 2017. 01. 007]